The influence of metal/perovskite-type oxide interfaces on tunability of thin film capacitors
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چکیده
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چکیده ندارد.
THE THIN FILM CAPACITORS WITH AlN DIELECTRIC
The work is focused on thin film technologies especially on sputtering of dielectric thin film layers. The set of thin film capacitors was created on silica glass substrate. Aluminum electrodes of separated capacitors are deposited by method of vacuum evaporation. The AlN dielectric layer was prepared by reactive high frequency sputtering from aluminum target in nitrogen atmosphere. Dielectric ...
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 2010
ISSN: 1882-0743,1348-6535
DOI: 10.2109/jcersj2.118.664